Sulfur hexafluoride Gas

Sulfur hexafluoride (SF6)
فهرست مطالب

Arian gas company  activities in supplying  different  kinds  of  industrial, laboratory, and medical gases.

  •  
  • pure Sulfur hexafluoride Gas
  • Sulfur hexafluoride (SF6) is an inorganic, colorless, odorless, non-flammable, extremely potent greenhouse gas which is an excellent electrical insulator. SF6 has an octahedral geometry, consisting of six fluorine atoms attached to a central sulfur atom. It is a hypervalent molecule. Typical for a nonpolar gas, it is poorly soluble in water but soluble in nonpolar organic solvents. It is generally transported as a liquefied compressed gas. It has a density of 6.12 g/L at sea level conditions, which is considerably higher than the density of air (1.225 g/L).
  • Main applications

Industries Applications

  1. Electronics In semiconductor manufacturing, sulfur hexafluoride is a fluorine source for high density plasma etching without generating carbon by-products. SF6 can be used for etching metal silicides (specially tungsten etchback), nitrides and oxides versus their metal substrates.     Other industries  
  • Sulfur hexafluoride is a insulating material used as a dielectric in electrical transformers.
  • SF6 can be used as a inert blanketing agent.
  • SF6 is a tracer gas for determining ventilation rates and air movements in buildings.

Gas Properties

  • Molecular weight  : 146.05 g/mol
  • Solid phase
  • Latent heat of fusion (1,013 bar, at triple point) : 39.75 kJ/kg

Liquid phase

  • Liquid density (at triple point) : 1880 kg/m3
  • Boiling point (Sublimation) : -63.9 °C
  • Latent heat of vaporization (1.013 bar at boiling point) : 162.2 kJ/kg
  • Vapor pressure (at 21 °C or 70 °F) : 21.5 bar

Critical point

  • Critical temperature  : 45.5 °C
  • Critical pressure  : 37.59 bar
  • Triple point
  • Triple point temperature  : -49.4 °C
  • Triple point pressure  : 2.26 bar

Gaseous phase

  • Gas density (1.013 bar and 15 °C (59 °F)) : 6.27 kg/m3
  • Compressibility Factor (Z) (1.013 bar and 15 °C (59 °F)) : 0.9884
  • Specific gravity (air = 1) (1.013 bar and 21 °C (70 °F)) : 5.114
  • Specific volume (1.013 bar and 21 °C (70 °F)) : 0.156 m3/kg
  • Heat capacity at constant pressure (Cp) (1.013 bar and 21 °C (70 °F)) : 0.097 kJ/(mol.K)
  • Viscosity (1.013 bar and 0 °C (32 °F)) : 0.000142 Poise
  • Thermal conductivity (1.013 bar and 0 °C (32 °F)) : 12.058 mW/(m.K)
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